Manufacturing processes for parts and sub-components in the semiconductor industry (also known as the “semicon” industry) rely on precision and accuracy. In this environment, working with such small-scale and intricate processes, there is little to no margin for error.
Many processes must be monitored with the highest level of control and precision to ensure quality in semicon manufacturing, including stringent requirements for leak testing in a variety of applications, like stage and motion control systems, cooling systems, electrical components, seals and gaskets, and exposure optics and sensors.
Overcoming challenges of a complex leak test for the semicon industry
innomatec prides itself on its innovative approach, always pushing forward to find ways to create better, cost-effective leak test solutions for evolving industries, like semicon manufacturing.
innomatec recently designed a new solution for leak testing a ReMa (Reticle Masking) system in a semicon EUV/DUV lithography machine. While this application had typically relied on tracer gas leak testing, innomatec designed a new air leak testing alternative, resulting in a simpler, more cost-effective leak test.
See how innomatec overcame the challenges posed by this complex leak test application, below.
Maintaining accuracy and pressure control over an extended leak test period
One of the challenges of this leak test application was the long test time—the manufacturer’s leak specifications required an extended leak test, measuring pressure drop over time for a period of one hour. Over this period, the maximum allowable pressure drop was only 5-15 mbar.
This limited pressure drop allowance combined with a long cycle time can make accurate leak test readings a challenge. However, the innomatec LTC-902 SI leak tester is uniquely able to maintain high precision measuring accuracy and pressure control over this extended leak test period, providing a reliable air leak test for this application.
READ THE APPLICATION NOTE TO LEARN MORE ABOUT THE LEAK TEST PROCESS ➡️
Maintaining accuracy and pressure control over an extended leak test period
The manufacturer also needed a way to gather data that would prove that their part met the required specifications. This is where innomatec’s leak test solution really exceeded expectations and surpassed any other solution on the market. innomatec’s leak testers offer as an option innoRC, a software feature that allows remote control of innomatec's leak testing devices through a Windows application.
innoRC was easily able to manage the fast feed transfer of large amounts of data gathered during the lengthy one-hour test cycle time to prove the quality of the entire process with the highest reliability on the market.
Copper-free design to mitigate corrosion risk in small, micro connections
Due to the very small micro connections within ReMa units in lithography machines, a copper-free design is required to ensure there is no interaction with the aluminum used in these systems, which could result in galvanic corrosion. This was one of the reasons these applications had typically relied on tracer gas leak testing, which allowed for no direct contact between the test machine and the ReMa unit.
However, innomatec was able to innovate a new leak tester model specifically for the semicon industry, the LTC-902 SI model, a copper-free air leak testing option that offers the high accuracy and precision required, while eliminating the risk of corrosion in this type of application.
LEARN MORE ABOUT INNOMATEC’S NEW LTC-902 SI LEAK TESTER
Solve your toughest leak test challenges with innomatec
innomatec has over 40 years’ experience delivering accurate, reliable leak test solutions to evolving industries and manufacturers across the globe, including those in automotive, electromobility, hydrogen fuel cells, and more. As the semicon industry evolves, innomatec will continue to lead the industry, delivering solutions for reliable, cost-effective leak testing.
Designing a leak test solution for the semicon industry? Contact the leak test experts at innomatec!